The Murata SCHA63X series combined high performance 3-axis angular rate and 3-axis accelerometer consists of X-, Y- and Z-axis angular rate sensors and integrated 3-axis accelerometer based on its proven capacitive 3D-MEMS technology. Signal processing is done with two mixed signal ASICs that provides angular rate via flexible SPI digital interface. It is designed, manufactured and tested for high stability, reliability and quality requirements.
Angular rate measurement range ±300°/s Acceleration measurement range ± 6 g Supply voltage 3.0V - 3.6V Operating temperature range −40°C - +110°C
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